Akrion, Inc. News
Akrion Books Multiple Batch-Immersion Systems
The equipment to be shipped includes a GAMA Series combination oxide etch/photo resist strip system for a US manufacturer of power management devices and a GAMA pre-gate clean system for a US manufacturer of analog and mixed-signal products. In addition, two refurbished AWP wet stations were sold to a European manufacturer of semiconductor devices for the automotive industry and will be used for front end cleaning applications.
Akrion's wet station platforms E200/9400, AWP, GAMA, i-clean and V3 have an install base of over 1400 systems. These reliable and flexible platforms utilize advanced technologies including megasonics, ozonated chemical solutions, in situ processing, and chemical concentration control. Two recent additions to the ICE chemical concentration control system are methods of controlling sulfuric acid/peroxide and phosphoric acid processes. This combination of features makes Akrion wet stations well suited for a variety of surface preparation applications.
About Akrion
Akrion is a provider of advanced surface preparation systems used in the manufacture of semiconductor devices. The company's products, which include single-wafer and batch-immersion cleaning systems, are used in the production of a wide variety of semiconductor devices, including logic devices, analog devices, flash memory, DRAM and MEMS and are used to clean bare silicon and test wafers as well as photomasks and PV/Solar. Headquartered in
SOURCE Akrion, Inc.
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