Novellus Systems, Inc. News
Novellus Ships 100 VECTOR Express Tools Within First Year
Since its launch in
VECTOR Express is also the foundation for Novellus' success in the fast-growing ashable hard mask (AHM) market. Using a specialized process chamber kit developed for VECTOR Express, Novellus AHM films provide superior etch selectivity, excellent CD control, low defectivity and improved device yield at advanced technology nodes. Introduced in
"To remain competitive, our customers have a fundamental need to improve manufacturing quality and reduce cost at every device generation," said
About VECTOR Express:
The VECTOR Express PECVD platform is used to deposit a variety of films for memory and logic devices. VECTOR Express delivers industry-leading productivity and fundamental thin film process improvement with its SmartSoak(TM) processing feature. SmartSoak takes advantage of the VECTOR platform's multi-station sequential processing (MSSP) architecture to control wafer heat-up independently from film deposition. This enables a more stable and consistent wafer temperature at the start of film deposition while simultaneously reducing thin film processing time.
About VECTOR Express with AHM:
The ashable hard mask (AHM) process technology on the VECTOR Express PECVD platform is designed to address the challenges in advanced technology nodes that utilize 193nm lithography for high-aspect patterning etch, where thinning photo-resist material makes it difficult to extend conventional patterning. The AHM film uniquely satisfies the demanding etch selectivity requirements of advanced device nodes while maintaining transparency to the light source used for wafer alignment during photo-resist exposure.
About Novellus:
Novellus Systems, Inc. (Nasdaq: NVLS) is a leading provider of advanced process equipment for the global semiconductor industry. The company's products deliver value to customers by providing innovative technology backed by trusted productivity. An S&P 500 company, Novellus is headquartered in
"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995:
This press release contains forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, including statements relating to (i) our belief that VECTOR Express enables leading-edge device manufacturers to extend PECVD technology to 45 nm and beyond with lower costs than previous generations; (ii) our belief that VECTOR Express is the foundation for our success in the fast growing AHM market; and (iii) our belief that to remain competitive our customers have a fundamental need to improve manufacturing quality and reduce cost at every device generation. Forward-looking statements are subject to risks and uncertainties that may cause actual results to differ materially from those contemplated by the forward-looking statements. Such risks and uncertainties include, but are not limited to, difficulties associated with managing the costs of production of our products and our customers' products; fluctuations in the success and growth rate of the AHM market; changes in our customers' business models; as well as other risks indicated in our filings with the Securities and Exchange Commission (SEC). For more details, please refer to our SEC filings and the amendments thereto, including our Annual Report on Form 10-K for the year ended
VECTOR Express and SmartSoak are trademarks of Novellus Systems, Inc.
SOURCE Novellus Systems, Inc.
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