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Akrion, Inc. News

Akrion Receives Another Single-Wafer Cleaning System Order

ALLENTOWN, Pa., Feb. 13 PRNewswire — Akrion, Inc. ("Akrion"), a supplier of semiconductor surface preparation equipment, recently received a purchase order for a single-wafer Velocity(TM) system from a manufacturer of Logic devices in Asia. Logic gates are present in a variety of integrated circuits used for electronic devices such as digital cameras, MP3 players and DVD recorders. The six-chamber Velocity will perform BEOL particle removal on the IMD (intermetal dielectric) layer in a Cu manufacturing process line.

Akrion offers various combinations of technologies for the Velocity platform including patented frontside and backside megasonics, along with JetStream(TM) spray, direct chemical dispense and watermark-free drying via the Sahara(TM) dryer. Akrion's process engineering team uses these technologies in various combinations to develop recipes specific to customer needs.

"Velocity's particle removal capability makes it a valuable tool for a great number of applications for manufacturers of NAND flash, DRAM, Logic, reclaimed silicon wafers and other products," said James S. Molinaro, Akrion president and CEO.

About Akrion

Akrion is a provider of advanced surface preparation systems used in the manufacture of semiconductor devices. The company's products, which include single-wafer and batch-immersion cleaning systems, are used in the production of a wide variety of semiconductor devices, including logic devices, analog devices, flash memory, DRAM and MEMS and are used to clean bare silicon and test wafers as well as photomasks and PV/Solar. Headquartered in Allentown, Pa., Akrion's Allentown production facility is ISO 9001:2000 and ISO 14001:2004 certified for quality and environmental management and by OSHA's VPP STAR program for safety management. For further information, please visit Akrion's Web site: http://www.akrion.com.

SOURCE Akrion, Inc.

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